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To: FJB who wrote (9971)11/18/1997 11:14:00 AM
From: Starlight  Read Replies (1) of 25960
 
Bob - I don't think there's any question that they intend to use x-ray from the beginning: >>>IBM said it plans to quickly shift the pilot fab to 0.15-micron technology after it is in production. As part of the investment, IBM said it intends to equip its X-ray lithography facility with 300-mm wafer equipment. IBM believes X-ray lithography is a leading candidate for next-generation production of ICs.<<<<

Betty
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