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To: James Word who wrote (10056)11/20/1997 9:07:00 AM
From: Bookdon  Read Replies (1) of 25960
 
These were two-level "alternating" PSM. My point is that although IBM (and a very few others) CAN make x-ray masks, it ain't easy.The problem is not only the "1X" resolution requirements, but also the substrate (membrane), which is hard to make without distortions. That couple with the lack of a commercial tool to make the masks, means that we are still 5 years away from x-ray being a real contender.
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