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Technology Stocks : Cymer (CYMI)
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To: Bookdon who wrote (10119)11/20/1997 12:47:00 PM
From: Starlight  Read Replies (1) of 25960
 
I've been told that the mask distortion at 1X isn't as great a problem as it seems as XRL has much greater process latitude. XRL doesn't have the cleanliness requirements or depth of focus requirements of optical systems because the wave length is so much smaller. It seems that IBM is well on the way to solving some of the mask problems, although I understand that production still isn't up to the quantity-level needed. (I'm no expert - this is just from what has been told to me.)

Betty
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