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To: Scott Brooks who wrote (1323)11/24/1997 6:08:00 PM
From: FJB  Read Replies (1) of 2946
 
OFF TOPIC about E-beam lithography. I saw a press release out of Japan the other day where Hitachi made a breakthrough in throughput in E-beam lithography. They had tripled the throughput of their tool from 3 to 10 WPH!!! Does anybody know what the throughput is for the SCALPEL system?

TIA,

Bob
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