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Technology Stocks : Silicon Valley Group
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To: FJB who wrote (1324)11/25/1997 7:44:00 AM
From: Bookdon  Read Replies (1) of 2946
 
I'd like to see the press release. Does it say what size wafer? Usually e-beam tools are limited in throughput by the area covered (since they write in a serial fashion). If this is for 6 inch wafers, then you would xpect by te time this technology is used the wafer size will be 8 or 12 inches (which translates to 2.25 or 4 times the area). That would indicate a throughput of 4 or 2.5 wafers per hour.
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