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Technology Stocks : General Lithography

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To: FJB who wrote (695)	11/25/1997 9:52:00 AM
From: TheSpecialist	Read Replies (1) of 1305

Refractive index homogeneity is defined as the uniformity of the angle at which light is transmitted through a material. If you think of a single point of light going through a lens it has an expected point of projection on the output side of the lens. If the refractive index changes slightly (from very minor changes at the molecular level like density), then there will be a difference from the actual and designed points of projection. Now if you take this to the level of imaging, where there are massively parallel adjacent points of light, you can envision how the uniformity of the material will affect the quality of the geometry being imaged. The concern with birefringence is due to stress in the material. During the growth cycle of the glass there are long heating and cooling cycles that leave residual stresses. These stresses affect the refractive index and hence the image quality. So, the bottom line is, there may be progress made on resistance to excimer damage, but it absolutely must also meet the other optical property requirements as they are not necessarily mutually exclusive. TS

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