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Technology Stocks : General Lithography
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To: FJB who wrote (699)11/26/1997 12:23:00 AM
From: Yousef   of 1305
 
Bob,

Re: "Is OPC technology universally used for 0.25 and under photolithography?"

Yes, OPC is used on a number of mask layers for .25um process (Trench,
Gate, Metal 1 & Metal 2 ... for example). Many companies have their
own software to generate the OPC features/"serifs". This is particularly
true of companies that have "in-house" mask making. The commercial
software can be difficult to utilize due to the need to tune the OPC
structures to the process and to be confident that no inadvertent changes
occur to the design. BTW, I wouldn't use MicroUnity.

Yousef
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