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To: Bookdon who wrote (10602)11/26/1997 6:01:00 PM
From: Peter Paulissen  Read Replies (2) of 25960
 
Re: Installation of Excimer Lasers in Semi-Conductor Fabs

Can anybody explain to me in a nutshell the time schedule and events needed for the installation of lasers and stepper in a semi-conductor fab?

a.) How long does it take the stepper people to build and test one of these machines, and at what time is the laser required in this process?

b.) How long does it take to install one of these steppers in a semi-conductor fab, and what testing is needed to get out all the bugs so that it can run for full scale production?
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