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To: D.J.Smyth who wrote (1329)	11/28/1997 10:41:00 AM
From: FJB	Read Replies (1) of 2946

RE:current krf excimer lasers can process 20 wafers per hour No Darrell, you're wrong. They start at 50 or 60 WPH and go up to 96 WPH. Here are the specs for ASML's product line. asml.com RE:tested krf at .09 line widths I would not hold my breath for production DUV tools capable of 0.09æ.

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