diana RE: "Problems with Cymer Lasers"
My experience is limited to R&D systems, ie systems that are not
heavily used 24hrs per day in production. My experience has thus far
been positive. My conversations with those who ARE using them in production, as well as the stepper manufacturers who are supporting them in the field, indicates that the performance of the Cymer laser has been quite good. I do not know anything about vibration problems with the lasers.
As for field support, IC companies, including the one that I work for, are always complaining about field support. You should hear what people say about Applied Materials, Canon, Mattson, Semitool and all the others. That is just a fact of life in the industry. Some semi equip companies are real boneheads. Some IC manufacturers are also boneheads in their dealings with vendors. Some IC manufacturers push their vendors to impossible extremes (Ive heard this about Motorola), and others treat their vendors as "partners" (Ive heard this about Intel). Don't worry about what one person says regarding "Poor Cymer field service". Also, I know that SVGL, Canon, and ASML are quickly training their own personell to service the lasers without Cymer's help. That should help in the long run.
James Word |
