THC,
Re: "Next we need to get Yousef's update from his meeting with Nikon U.S."
I had a meeting with the technical representatives of NPI (Nikon Precision
Instruments). I got the answer to a number of questions about Cymer as
well as sales forecasts for DUV tools for '97 and '98.
Nikon currently sells two models of DUV tools. The S202 (scanner) and
the EX12B (Body 12 DUV stepper). Total DUV tool deliveries (both S202
and EX12B) for '97 will total 75 - 100 tools. Next year, they expect to
sell about 50 scanners in the US and a total of 150 tools. (The EX12B
is a .25um - .30um tool and the S202 is a .18um - .25um tool) Delivery
leadtimes are about 15months for a stepper and 18 - 24 months for a scanner!!
Nikon sells the majority of their tools with Cymer lasers, but they did
say that a number of Japanese tools have been shipped with Komatsu lasers.
They also indicated that there have been problems with Cymer lasers, but
Cymer has been working hard to fix these:
1) Laser chambers "died" within a short period of time (covered by warranty)
2) Problems with their "solid state" power modules
3) Problems with their High Voltage HV supplies
4) Software problems ... we didn't discuss this much.
Nikon is also evaluating other vendors:
1) Luminomics (sp?) - Nikon is not impressed with them.
2) Komatsu - Nikon is shipping some Japanese tools with this laser.
3) Lambda-Physik - Nikon is very impressed, good results and outstanding
technology.
Currently, Nikon has about 100 Cymer lasers in the field. I was also
surprised to learn that the interface between the laser and DUV tool is
not custom, so that a customer can use any of the above laser vendors.
I currently have a DUV tool that was delivered in October. The Cymer
laser was one of the first things that was "fired up", so that laser has
been running for about 2 months with no problems. I will know much more
about the laser when we start acceptance testing in late December. I
should be able to give a follow-up post in early January.
My assessment ... Obviously, Cymer has the majority of the 248nm laser
business currently. Japanese companies are tending to want an alternate
Japanese laser vendor. Lambda-Physik could be another alternative supplier
in '98 or '99. This 248nm laser will be used for both .25um and .18um
technologies (should last the next 5 years). Cymer has had some early
problems due to fast growth and debugging the early lasers. I think
Cymer prospects look very good in '98, but I would watch for competitors
to take some of their market share starting late in '98.
Hope this helps,
Yousef |
