Tulvio,
To summarize our discussion:
We both agree that the line will produce 80 FINISHED wafers per hour, or 40 FINISHED wafers per stepper per hour.
To me, this does not mean that mix-and-match line is less productive than the line of 2 laser steppers.
To achieve the productivity of 80 FINISHED wafers per hour, one must be able to finish the chip in one run. If this is possible, then there is simply no need for antother stepper, no matter what light source it uses.
I had implicitly assumed that we were talking about the case when two runs per wafer are needed to print two different layers. In this case, even if you plan to use one stepper, this stepper will have to do two runs to finish the wafer. Its productivity will still be 80/2 = 40 FINISHED wafers per hour per stepper, same as for our hypothetical line.
The important question arising from this misunderstanding is whether the reduction in the line width could help to reduce the number of runs needed to finish the chip? I don't know the answer. Would be nice, but somehow seems unlikely.
Always a pleasure to talk to you
Regards,
Y. |
