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To: FJB who wrote (11543)12/15/1997 10:32:00 AM
From: Tulvio Durand  Read Replies (2) of 25960
 
"DUV litho will be around for DECADES" -- wow! Thanks for the links. Bob, please enlighten us on "critical" vs. "noncritical" dimmensions and layers and the "mix and match" art. I take it that printing the entire wafer with 0.25 nm DUV is uneconomical or unfeasible or both. Tulvio
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