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To: Maxwell who wrote (11564)12/15/1997 10:31:00 PM
From: Tulvio Durand  Read Replies (1) of 25960
 
A ratio of 3:1 i-line/DUV steppers in new orders was announced by ASM recently. Since chip manufacturers already have i-line steppers why do they need to buy more of them now, when the trend is towards 0.25 nm? Do these new i-line steppers have capability to do higher resolution features? For example, can they be retrofitted later with DUV excimer lasers? Thanks, Maxwell, for your in-depth explanation. Tulvio
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