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To: Paul Dieterich who wrote (278)12/23/1997 12:38:00 PM
From: Mr. Aloha  Read Replies (1) of 582
 
Here's a LONG article descriping the different wafer materials needed for high density lines.

At the end they mention the use of an excimer laser and what type of elements it can be used with.

techweb.com;

You'll need to copy the link and post it to locate.

Aloha
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