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To: C. Shivery who wrote (274)	12/24/1997 11:10:00 AM
From: C. Shivery	Read Replies (1) of 509

[E05.04] Challenges in Microelectromechanical Structure Modeling for Sensors and Actuators (MEMCAD) Stephen D. Senturia (Massachusetts Institute of Technology) Silicon micromachined structures are finding a wide domain of application: as sensors for pressure, acceleration, and flow; as actuators for pumps, valves, linear and rotary micromotors, and optical displays; and even as passive components, such as nozzles for automotive fuel injectors, and flow channels in biomedical instrumentation.

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