Definitely,
PTI's Shuttlelock Series and Versalock tm 700 are used in MEMS applications. The Shuttlelock is mainly used by research groups and the Versalock is used as the automated production version. The Versalock can be used initially as a pilot production vehicle, transitioning to full production.
The four areas that PTI has target are:
1. Photomask (master pattern using to manufacture semiconductors)
2. Thin Film Head (disk drives)
3. Optoelectronics/Telecommunications (LEDs, solid state lasers, etc)
4. Microelecromechanical Systems (MEMS)
They also continue to participate in R&D for new products (7-8% of revenue is used for R&D). Their connections to Universities and Industrial R&D allow them to remain on the bleeding edge.
Specifically related to MEMS:
The technology that they license from Robert Bosch GmbH allows for deep trench etching. The technology transfer from the licenser has been completed and Plasma-Therm has achived parity with the best silicon trench etching results available from any supplier with any technology. These demanding specifications are achieved using only relatively safe fluorine chemistry and, because the substrate temperatures is at or slightly above ambient, there is no requirement for cryogenic cooling.
Plasma-Therm utilizes a proprietary ICP source mounted to high performance processing platforms to provide advanced capability silicon trench etching results. The systems feature high conductance vacuum systems, active subtrate cooling and advanced PC / Windows based control systems that permits the wide range of flexibility that accomodates the needs of this innovative process technology.
Typically the process offers a silicon etch rate of 1.5-3.0 microns/minute, with a demonstrated aspect ratio greater than 50:1, anisotropic profile, and a selectivity over photoresist exceeding 100:1 and a selectivity over Oxide exceeding 125:1
This is a bleeding edge technology that will enable PTI to continue forward with its outstanding growth rates they have seen over the past couple of years.
There are many reasons for the recent decline, but I look at the price as a "blue light special" and have added more to my portfolio today!
Hopefully this will help |
