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Technology Stocks : Cymer (CYMI)

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To: James Connolly who wrote (11954)12/25/1997 8:46:00 PM
From: FJB  Read Replies (2) of 25960
 
Here's an interesting article for you JC. If other 0.25&#181m 64Mb SDRAM processes are even close in complexity, then the demand for DUV tools is as large as previous reports have indicated.

pubsys.cmp.com
Toshiba expects production at its Yokkaichi Works in western Japan to hit 500,000 64-Mbit SDRAMs per month in the fourth quarter of this year. The 0.25-micron process requires the use of KrF excimer-laser steppers for eight to 10 critical mask layers, as well as chemical mechanical polishing for planarization.

Monthly production of 3 million 64-Mbit DRAMs--equally divided between SDRAMs and EDO-type parts--is expected by next March. The company will offer SDRAM in by-4, by-8, and by-16 configurations, with access times ranging from 6.5 to 10ns.

The Prism design was accomplished after Toshiba, IBM and Siemens completed a 256-Mbit technology demonstration. The companies then applied the basic trench capacitor and 0.25-micron process technology to the 64-Mbit generation.

After that work was completed, Toshiba brought back about 70 engineers from East Fishkill to optimize the process for 64-Mbit production at Yokkaichi. IBM and Siemens joined forces on a 1-Gbit DRAM trench-capacitor-based cell design.


Pretty cool, eh?

Bob
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