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To: FJB who wrote (11955)12/25/1997 9:45:00 PM
From: Angela  Read Replies (1) of 25960
 
Robert & Everyone --

techweb.cmp.com

Has this article been posted?

Intel is evaluating Canon's DUV / 300 mm Stepper for
the I300I consortium for one year. Intel will share
test data with I300I member companies. Intel plans to
develop its own processes on this Stepper.

It's called the EX3L stepper and has .18 micron
photolithography.

From the article -- "Two other unidentified chip makers
have also purchased Canon's 300-mm EX3L steppers."

Angela
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