Formerly About Advanced Micro Devices Message Board

STOCKTALK

We've detected that you're using an ad content blocking browser plug-in or feature. Ads provide a critical source of revenue to the continued operation of Silicon Investor. We ask that you disable ad blocking while on Silicon Investor in the best interests of our community. If you are not using an ad blocker but are still receiving this message, make sure your browser's tracking protection is set to the 'standard' level.

Politics : Formerly About Advanced Micro Devices

Public Reply Prvt Reply Mark as Last Read File

Previous 10 Next 10 Previous Next

To: Brumar89 who wrote (1003072)	3/1/2017 5:53:51 PM
From: PKRBKR	Read Replies (2) of 1572643

NF3 gained popularity as a substitute for even more harmful global warming gases that were used in the same types of manufacturing I actually know a lot about this as I worked on a Sematech committee battling the Clinton/Gore EPA to reduce per-fluorinated hydrocarbons (CF4, C2F6, CHF3, etc.) as they had "High" global warming potentials. These gases are used as silicon, silicon dioxide, Ti and W etch gases and were/are critically important to making semiconductors. Ironically NF3 was offered up as a replacement source of fluorine even with a much higher global warming potential. The NF3 could be cracked in a microwave plasma downstream from the process tool and the F could be water scrubbed away. The other gases were less amenable to plasma destruction so the industry offered this expensive approach and the EPA backed down a bit. Regardless the minuscule emissions of all of these gases don't add up to squat in the atmosphere. No wonder there is no more silicon being made in Silicon Valley.

Report TOU Violation

Share This Post

Public Reply Prvt Reply Mark as Last Read File

Previous 10 Next 10 Previous Next