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Technology Stocks : JMAR Technologies(JMAR)
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To: timwa who wrote (4794)1/13/1998 4:41:00 PM
From: Starlight  Read Replies (1) of 9695
 
The added information is an excellent overview of the various lithography types. I thought this paragraph about EUV was interesting:
>>>JMAR's PXS is routinely capable of producing the EUV light that will eventually be required by future EUV lithography systems. As EUV process technology matures JMAR expects to play a more active role as a supplier of high performance EUV sources. However, much process development work is required before EUV technology will approach the already demonstrated capability of current X-ray lithography technology which is the third method for producing 0.13 micron and smaller feature sizes.<<<

It appears that JMAR will not only participate in X-ray litho., but
also EUV (although at a later time).

I hope everyone copies the added info to disk, as it will be a good reference for the future.

Betty

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