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To: James Word who wrote (12560)	1/14/1998 12:32:00 AM
From: Maxwell	Read Replies (2) of 25960

<<No. They use Hg-lamp based Micrascan II QML systems. Cymer may have to wait until the 0.18um generation for Intel to be a big customer.>> Intel has been experimenting and production (pilot line) with .25um for the past 3 years. At that time they were committed to the Micrascan II and ordered a bunch of them since the excimer stepper was not available. Since the introduction of the laser stepper INTC has been evaluating those steppers. My source (not yet verified) said that they are putting those into production in the newer fabs. If you are working for Intel you could shine some light in this subject James. Maxwell

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