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Technology Stocks : Cymer (CYMI)

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To: FJB who wrote (12617)1/15/1998 1:28:00 AM
From: James Word  Read Replies (1) of 25960
 
Rober RE: 64Meg DRAM and DUV.

"Without a true 0.25um process, the die size of a 64Mb is around 200mmø. "

That's 2 die per stepper field. Not bad, but if the 0.25um shrink
scales area by 50%, then you'd get 100mm2 area and 4 die per field.
That's an incentive.

"What are the flaws with this simplistic analysis James?"
It's probably essentially true. 1 DRAM generation is equal to 1 process shrink, so if 16Meg was 0.35um then 64Meg should be 0.25um.

I think that the only catch is that within each generation of
memory density lies around 3 different shrinks. For instance
a first generation 64Meg may start at 0.30um, 2nd generation 64Meg
may shrink to 0.25um while 3rd generation 64Meg might be 0.22um.
I'm not a DRAM expert but I think that's correct.

Don't forget that DRAM manufacturers are the ones pushing i-line
below 0.35um down to 0.25um with Phase Shift Masks and Off Axis Illumination, and, alas, no Cymer laser.

James Word
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