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Technology Stocks : Cymer (CYMI)
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To: James Word who wrote (12631)1/15/1998 1:50:00 AM
From: FJB  Read Replies (1) of 25960
 
James,

RE:Don't forget that DRAM manufacturers are the ones pushing i-line
below 0.35um down to 0.25um with Phase Shift Masks and Off Axis Illumination, and, alas, no Cymer laser.

Does photolithography with excimer laser steppers require PSMs and OAI for 0.25 dimensions? What are the major pros and cons for excimer lasers vs. extending i-line to 0.30 or 0.25 resolutions?

TIA for your thoughts and time,

Bob
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