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To: Yakov Lurye who wrote (12622)	1/15/1998 2:04:00 AM
From: FJB	Read Replies (1) of 25960

Y., One last thing for this evening. RE:Consider the AMD case: they were probably one of the first companies experimenting with DUV. I would guess that they have been working on DUV at least since early 1997 - witness a July article describing their experience with DUV lasers (and one of the issues raised in that article was that introduction of DUV requires massive process reengineering, production line balancing etc.). They are under a lot of pressure, yet just starting the .25 ramp up. DUV has been in the lab for several years now. 1998 is when it comes out of the lab into production. Levinson published his DUV work(done in '96) for AMD in the '97 SPIE "Microlithography, blah, blah Handbook". IBM has their old work in this field at: almaden.ibm.com Bob

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