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Technology Stocks : Cymer (CYMI)
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To: FJB who wrote (12609)1/15/1998 3:36:00 PM
From: Tulvio Durand  Read Replies (3) of 25960
 
I-line is 0.25um-capable because its light spectrum contains a small amount of DUV, but significantly less than the DUV output from Cymer's KrF laser. I surmise that the wafer print rate is substantially less for i-line compared to Cymer's KrF laser as there would be required a greater exposure time with i-line. Bob, am I correct in surmising this? Tulvio
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