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Technology Stocks : Cymer (CYMI)
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To: Tulvio Durand who wrote (12664)1/15/1998 8:45:00 PM
From: James Word  Read Replies (1) of 25960
 
Tulvio RE: "I-line is 0.25um-capable because its light spectrum contains a small amount of DUV, but significantly less than the DUV output from Cymer's KrF laser. "

Correct. The Mercury emission spectra doesn't contain any strong
peaks in the deep UV range. Therefore the intensity is probably
quite low, and that does impact throughput.

James Word
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