Found this today,
Does this Canon system use a Cymer laser. I hope so!
Canon USA, Inc. revealed last week that its 300-millimeter FPA-3000EX3L deep-ultraviolet (DUV) wafer stepper became operational at the International 300mm Initiative (I300I) facility in Austin, Texas. The company also revealed that the new stepper has been accepted by I300I and Intel following a successful performance test in which the EX3L exposed more than 1,500 12-inch wafers without failure. Due to the consortium's limited funding, Intel purchased the machine for use by I300I under a one-year contract that will allow sharing of resulting data with all member companies. Intel will also develop its own exclusive processes on the stepper. Earlier this year, Selete, a 300mm development consortium of Japanese major IC manufacturers including new member Samsung of Korea, installed a Canon EX3L at its facility. Two Selete and I300I member companies also have Canon FPA-3000EX3L steppers in place; these companies were not named.
More,
Several other industry analysts weighed in with their equipment forecasts briefly during a Jan. 7 panel at the ISS. For 1998, they all came in between the VLSI Research and Dataquest forecasts. Ms. Billat predicted 2 percent industry growth for 1998 and 15-20 percent growth for 1999. Brett A. Hodess, managing director at NationsBanc Montgomery Securities, called for 5 percent 1998 growth and 17 percent 1999 growth. Jay Deahna of Morgan Stanley forecasted growth of 7 percent in 1998 and 15-20 percent in 1999. And H. Elliot Rogers, Jr., managing director of Deutsche Morgan Grenfell Technology Group said growth would be 10 percent for 1998 and 30 percent for 1999. "1999 could be a phenomenal year," Mr. Rogers said. All four analysts agreed that the oversupply of DRAM will continue through 1998. |
