This is from the latest SAL newsletter, "One Step Ahead", Vol.3, No. 1, 1998:
Share-A-Synchrotron
SAL plans to build a facility in California's Silicon Valley region that will house and maintain a synchrotron to provide x-rays for twenty individual clean room bays. The bays will be leased to semiconductor manufacturers who can install x-ray steppers and process equipment. This will allow companies to investigate x-ray lithography, do process and product development, and even manufacture product without the need to purchase, house and maintain a synchrotron. The total cost of leasing a bay and purchasing an
x-ray stepper from SAL will be about the same as the cost of a DUV stepper. Further details about this project are available from SAL.
X-ray lithography is a leading contender for post-optical lithography Discussing the next-generation lithography options, Michael Polcari of IBM stated, "The other technologies are where x-ray was 10 years ago. X-ray has an existing and an evolving infrastructure; the other technologies don't have that."1
X-ray lithography's proven capability and evolving infrastructure are the results of many cooperative efforts and numerous alliances. SAL, the innovator, has played a responsible role, and has a clear path to influence the future.
1 Electronic News/VLSI Research Report, Volume 8, Issue 19, Oct 13, 1997. |
