Elizabeth, All the action I see from IBM, other companies like Lucent, and universities just says R&D work to me. That's a long way from getting ready, which implies that a decision has been made re process. It is clear that there is no single agreed upon process for .18 micron or lower light source and that at least FIVE competing technologies are going for the gold so to speak, with only DUV in commercial production. This in itself is a two year lead, minimum!! It's awfully early for a newsletter to be so arrogant, or to cheerlead, unless they have a vested interest or agenda. DUV, EUV, electron beam, i line, and XRL will slug it out NOT BASED UPON TECHNOLOGY, BUT BASED UPON COST BENEFITS. As an example, an x ray synchotron takes up a lot of very expensive clean room floor space.
Chalks |
