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To: FJB who wrote (13056)1/23/1998 8:40:00 PM
From: James Word  Read Replies (2) of 25960
 
Yakov and Robert RE: % of DUV vs. I-LINE

Although the majority of layers on a 0.25um process are not super-critical and don't require DUV, I'm not surprised to see
a high percentage of DUV orders in 1998. That's because many companies, expecially those strapped for cash, will want to use their
old i-line tools in conjunction with newly purchased DUV tools.
That is what our company will do, and I know that many others will as
well. Those Japanese DRAM manufacturers who are slowing 16M and ramping 64M won't just shit-can their i-line tools. Many will want
to augment them with DUV in 1998 and move to 0.25um and 64M.

James
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