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Technology Stocks : Cymer (CYMI)
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To: Yakov Lurye who wrote (13091)1/26/1998 2:04:00 PM
From: James Word  Read Replies (1) of 25960
 
Yakov: RE 0.22um at 248nm
Since 193nm steppers don't exist in large numbers they will use 248nm
lasers. Canon's next generation Excimer Stepper is spec'd for 0.22um
production and will ship near the end of the year. Even existing
equipment is probably capable though.

Don't forget that DRAM manufacturers have many tricks that they can
use like phase shift and off axis. These aren't available to logic
producers like Intel or TI.

James Word
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