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To: William Nelson who wrote (1422)	1/31/1998 11:06:00 AM
From: Jay8088	Read Replies (2) of 2946

It is the difference between step and scan (svgi's micrascan) approach vs. old stepper approach. svgi has pioneered step and scan lithography in the belief that it is necessary as you go below .25 micron. If chipmakers do agree with svgi and decide to go with step and scan machines, svgi is in a catbird's seat. On the other hand, if other stepper makers improve thir machines to match the eperformance of micrascan, then there is no special advantage. One side remark: ASM will be hit hard by asian flu. svgi is relatively insulated from it.

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