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To: GREATMOOD who wrote (13911)	2/2/1998 6:25:00 PM
From: Czechsinthemail	Read Replies (2) of 25960

New and exclusive features of the FPA-3000EX5 combine to deliver more than 90 wafers per hour (8-inch, 60 shots, 300 J/m2) with high optical resolution and reduced laser operation costs. A question for those in the field: how do these Canon specs compare with other DUV equipment? Has Canon developed a "new and improved" DUV machine? It sounds like good news to me. Baird

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