MEMS Review ...................
I think I see a pattern here <g>
3/97
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(Nasdaq: PTIS) announced today the completion of sale and installation for its Shuttlelock(R) MEMS Etcher(TM) to one of world's most recognized nanofabrication facilities. Cornell Nanofabrication Facility Buys Shuttlelock(R) SLR 770 ICP MEMS Etcher(TM
5/97
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ST. PETERSBURG, Fla., May 8 /PRNewswire/ -- Plasma-Therm, Inc.
(Nasdaq: PTIS) announced today the sale of its Shuttlelock(R) MEMS Etcher to an advanced research laboratory of the United States Government. The system will be used for leading edge microelectromechanical systems (MEMS) device development and limited production.
5/97
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ST. PETERSBURG, Fla., May 22 /PRNewswire/ -- Plasma-Therm, Inc.
(Nasdaq: PTIS) announced today the sale of a number of plasma processing systems for use in microelectromechanical systems (MEMS) device production. A total of four systems have been ordered by two leading research and development facilities located in Georgia
and New Mexico.
9/97
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ST. PETERSBURG, Fla., Sept. 17 /PRNewswire/ -- Plasma-Therm, Inc.
(Nasdaq: PTIS) announced today the sale of a dual chamber Shuttlelock(R) Inductively Coupled Plasma (ICP) system for the application of high volume production of Microelectromechanical Systems (MEMS) devices. The customer is a large aircraft manufacturer, that participates in numerous civilian and
fense related high technology arenas, and has multiple worldwide locations.
9/97
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Plasma-Therm, Inc. Announces Additional Shuttlelock(R)
SLR 770 ICP MEMS Etch Capability Purchase by Cornell
Nanofabrication Facility
ST. PETERSBURG, Fla., Sept. 24 /PRNewswire/ -- Plasma-Therm, Inc.
(Nasdaq: PTIS) announced today the completion of sale for additional
Shuttlelock(R) MEMS Etch to one of world's most recognized nanofabrication facilities, the Cornell Nanofabrication Facility.
The system will be used for Micro-Electro-Mechanical Systems (MEMS) device production and characterization.
1/98
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Plasma-Therm, Inc. Announces Sale of First MEMS System in
Europe
ST. PETERSBURG, Fla., Jan. 22 /PRNewswire/ -- Plasma-Therm, Inc. (Nasdaq: PTIS - news) announced today the sale of a Shuttlelock(R)
770 plasma processing system to Twente MicroProducts, a leading producer of Microelectromechanical Systems (MEMS) devices
located in the Netherlands. The system incorporates
Plasma-Therm's Inductively Coupled Plasma (ICP) technology
and will be used in the development and fabrication of
advanced MEMS products through deep silicon etching, incorporating etch technology licensed from Robert Bosch,GmbH.
1/98
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Plasma-Therm, Inc. Announces Sale of Shuttlelock(R) 770 to
University of California, Los Angeles
ST. PETERSBURG, Fla., Jan. 27 /PRNewswire/ -- Plasma-Therm, Inc. (Nasdaq: PTIS - news) announced today the
sale of a Shuttlelock(R) 770 plasma processing system to the University of California at Los Angeles, a leading research
center for the fabrication of Microelectromechanical System (MEMS). The system incorporates Plasma-Therm's
Inductively Coupled Plasma (ICP) technology and will be used in the development of advanced MEMS products. It
will be used for deep silicon etching, incorporating etch technology licensed from Robert Bosch, GmbH.
2/98
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SOURCE: Plasma-Therm, Inc.
Tel Aviv University Buys Shuttlelock(R) SLR 770 ICP MEMS Etcher
ST. PETERSBURG, Fla., Feb. 3 /PRNewswire/ -- Plasma-Therm, Inc. (Nasdaq: PTIS - news) announced the
completion of a Shuttlelock MEMS Etcher sale to one of Israel's most recognized MEMS fabrication facilities, the
University of Tel Aviv. Using Plasma-Therm's Inductively Coupled Plasma (ICP) system, the customer will produce
advanced Micro-Electro-Mechanical Systems (MEMS) devices.
Regards,
John
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