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Politics : Formerly About Advanced Micro Devices
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To: Paul Engel who wrote (28316)2/4/1998 11:41:00 PM
From: Yousef  Read Replies (2) of 1572159
 
Paul,

Re: "For a Fab producing 6,000 or 7,000 eight inch wafers a week ... how
many steppers would be required for the yellow room?"

A good rule of thumb for 200mm wafers is a stepper is good for about
900 outs/month (19 mask process). But remember for a .25um process, there
will be about 3 I-line steppers for each DUV tool. Thus the answer to
your question is:
6000 wfr/week needs 7 DUV tools and 21 I-Line steppers
7000 wfr/week needs 8 DUV tools and 24 I-Line steppers

Make It So,
Yousef
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