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Politics : Formerly About Advanced Micro Devices
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To: FJB who wrote (28357)2/6/1998 9:50:00 PM
From: Yousef  Read Replies (1) of 1572312
 
Bob,

Re: "How many track systems per stepper are required?"

One track is needed for each stepper/scanner ... These days, one track
has multiple resist spin/develop cups and hot plates. Even with this, one
track has a hard time "keeping up" with a DUV exposure tool.

Make It So,
Yousef
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