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Technology Stocks : Cymer (CYMI)

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To: James Word who wrote (14351)	2/7/1998 9:05:00 PM
From: TI2, TechInvestorToo	Read Replies (1) of 25960

James, I am glad you elaborated on this point of upgrades. I did not get a chance to get clarity on the post. Maybe We should get the author to clarify his point. I agree that in the case of refractive based systems your point of upgrades being prohibitive is true. Is there any chance that the SVGL systems could be upgraded? By the way, that brings up a question I have been meaning to ask. I thought the SVGL systems were always DUV, just that the initial systems (10 yrs ago) were Hg bulb based. This meant that the power was low and prompted the need for amplified resists. So are SVGL systems also I line systems? If so, are upgrades any easier? Thanks TI2 PS: What are your thoughts on TSI at 70 nm linewidths from the reference in the other post (and on CYMI news board)?

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