SI
SI
discoversearch

We've detected that you're using an ad content blocking browser plug-in or feature. Ads provide a critical source of revenue to the continued operation of Silicon Investor.  We ask that you disable ad blocking while on Silicon Investor in the best interests of our community.  If you are not using an ad blocker but are still receiving this message, make sure your browser's tracking protection is set to the 'standard' level.
Technology Stocks : Cymer (CYMI)
 Public ReplyPrvt ReplyMark as Last ReadFilePrevious 10Next 10PreviousNext  
To: BJFW MD who wrote (14423)2/8/1998 5:18:00 PM
From: FJB  Read Replies (1) of 25960
 
RE:YAG lasers for 193nm.

Cymer has looked at this. They don't think it's the way to go. BTW, a circa 1995 ArF laser from Cymer operating at 350Hz put out 6W of power on average.

Here were Akins' comments on this topic in a previous call:

Ushio is a different kind of competitor. You know they all, that they manufacture the mercury bulb used in steppers. Ushio has had a press release recently discussing their work on a solid-state alternative light source technology - alternative to excimer laser light source technology. This is not a new alternative. It was proposed oh, maybe seven years ago or so by, principally by Sony. Sony developed this technology. It's a YAG laser, frequency-multiplied to the Deep-UV area. There are significant limitations to average power in these machines. There are significant problems with spatial coherence which provides [here a word that sounds like 'speclum'] noise in the wafer. You have to gang these lasers together to produce the types of average power required. I ask anyone interested to check into the literature - which has been in place for years now - about the real competitiveness issue and cost of ownership associated with these lasers. We actually hired a graduate student from UC Berkeley about five years ago who did his thesis on comparing solid-state laser alternatives to excimer lasers for Deep-UV lithography. He worked in
[here a word that sounds like Dote] Oldham's group, and we stay very abreast of these technologies, and at this point in time as in the [unintelligible] past five to seven years we feel that excimer lasers are the best solution to this problem.
Report TOU ViolationShare This Post
 Public ReplyPrvt ReplyMark as Last ReadFilePrevious 10Next 10PreviousNext  

HomeMailHotSubjectMarksPeopleMarksKeepersSettings
Terms Of UseContact UsCopyright/IP PolicyPrivacy PolicyAbout UsFAQAdvertise on SI
© 2025 Knight Sac Media.  Data provided by Twelve Data, Alpha Vantage, and CityFALCON News