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Technology Stocks : Cymer (CYMI)
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To: TideGlider who wrote (14433)2/8/1998 8:58:00 PM
From: Tulvio Durand  Read Replies (1) of 25960
 
SVGI used to be 'leading source of DUV in the world'. That was before Cymer introduced the DUV excimer laser, now used by all the major stepper manufacturers. SVGI's Micrascan-2 employs Hg lamp and mirrors (instead of lenses) with which to focus the small amount of DUV energy available from the Hg bulb. Intel still uses Micrascan-2 in production of 0.25 (and some sub 0.25) micron dimensioned ICs. SVGI's newer Micrascan-3 employs the Cymer 5000 DUV laser which has greater DUV energy and allows printing wafers in less time compared to its predecessor. Tulvio
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