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White Oak Runs First Silicon On Canon DUV Steppers
SANTA CLARA, CALIF. (Feb. 9) BUSINESS WIRE -Feb. 9, 1998--The
Semiconductor Equipment Division of Canon U.S.A., Inc., has announced
that the first of its i-line FPA-3000i5 and deep UV FPA-3000EX4
steppers at White Oak Semiconductor have begun printing wafers.
Additional Canon machines, including next generation i-line and DUV
systems, will be coming on-line in the next few months at the huge new
facility near Richmond, Va.
To meet White Oak's intense requirements for vendor support, Canon set
up a Richmond office within its Eastern Region in addition to bringing
in specialized teams for the installation and ramp up of each type of
Canon tool. When the office reaches its full staffing level later this
year, Canon will have 8 to 10 service people providing 24-hour support
to White Oak, plus an administrative staff including applications,
sales and technical support. Jim Scrivano, a 14-year Canon veteran, is
the Richmond site manager.
The new Richmond office will also help Canon serve the anticipated
growth of semiconductor fabrication in the area, such as Motorola's
recently announced $3 billion expansion near Goochland, Va. Both
Motorola and Siemens have been strategic partners with Canon, Inc.
The FPA-3000EX4 steppers installed at White Oak use many of Canon's
latest advances in DUV technology. These include a Fast Linear motor
Air-guided Tilt (FLAT) stage, CQUEST II super illumination mode, and
edge-shot optimized tilt focusing system (CCD OPTF II). A higher
intensity excimer laser source for the EX4, supplied by Cymer, Inc.,
allows greater than 35% wafer throughput increase than the previous EX3
model which uses a Cymer 4000 series laser source.
Notes to editor:
White Oak Semiconductor is a joint venture between Siemens
Microelectronics Group and Motorola Semiconductor Products Sector. The
facility started equipment installation in early October 1997. It
expects to be producing advanced memory chips in spring 1998.
The Semiconductor Equipment Division of Canon USA, based in Santa
Clara, Calif., is a leading manufacturer of step-and-repeat and
step-and-scan photolithography tools used in semiconductor fabrication,
and of large panel aligners for AMLCD flat panel displays.
Canon USA, Inc., is a leader in professional and consumer imaging
equipment and information systems. Headquartered in Lake Success,
N.Y., Canon U.S.A. oversees sales and marketing, manufacturing, and
research and development throughout North, Central and South America
and the Caribbean, employing more than 9,000 people. Canon, Inc.
headquartered in Japan, employs 70,000 people worldwide.
-0- jc/ms*
CONTACT: Canon U.S.A., Inc., Semiconductor Equipment Div.
Phillip Ware, 972-409-7845
or
Yuan Zhang, 972-409-7841
or
Bozell Kamstra
Bill Keck, 580-233-2496
KEYWORD: CALIFORNIA
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