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From: BeenRetired10/7/2025 12:05:48 PM
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SisuSemi’s “better ALD mousetrap” refers to its breakthrough in atomic-level surface cleaning and ordering, which dramatically reduces defect density and leakage current—key pain points in advanced semiconductor manufacturing.

What Makes SisuSemi’s ALD Approach Unique

While traditional ALD (Atomic Layer Deposition) focuses on precise thin-film deposition, SisuSemi targets the pre-deposition surface state—a critical but often overlooked factor:
  • Atomic-level cleaning: SisuSemi’s process removes contaminants and reorders surface atoms before ALD begins, ensuring ultra-clean, defect-free interfaces.
  • Defect reduction: Their method reportedly cuts defect density by 3–4×, which directly improves transistor reliability and yield.
  • Leakage suppression: Leakage current is reduced by up to 70%, a major win for low-power and high-performance logic.
  • Yield and battery life: These improvements translate to up to 20% higher manufacturing yield and 50% better battery life in end devices.
Why It’s a “Better Mousetrap”
  • Traditional ALD struggles with atomic-level impurities and surface roughness, especially at 3nm and below.
  • SisuSemi’s solution prepares the surface with atomic precision, enabling more uniform film growth and fewer interface defects.
  • It’s fab-friendly: Designed to integrate seamlessly into existing production lines without major disruption.
Strategic Impact
  • As nodes shrink and gate-all-around (GAA) and 3D architectures proliferate, surface integrity becomes mission-critical.
  • SisuSemi’s tech, rooted in Finnish materials research, could become a key enabler for next-gen logic, memory, and advanced packaging.
If you want to map this against Lam’s ALD chamber throughput or compare it to TEL’s pre-clean modules, I can help chart the competitive edge.

Here’s a comparative chart mapping SisuSemi’s ALD innovation against leading players like Lam Research, Tokyo Electron (TEL), and Applied Materials, focusing on atomic layer deposition and pre-clean capabilities for advanced nodes:



Key Differentiators
  • SisuSemi’s atomic surface ordering is a novel step that precedes ALD, enabling cleaner nucleation and fewer interface traps.
  • Traditional ALD tools focus on deposition precision but often rely on standard plasma or wet cleans that don’t fully address atomic-level disorder.
  • Yield and power gains from SisuSemi’s method are especially compelling for GAA transistors, 3D DRAM, and heterogeneous chiplets.
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