Intel Rumored to Purchase more ASML High-NA EUV Equipment
2025-10-02
As per TechNews, citing Wccftech, Intel will raise its order of High-NA EUV (High Numerical Aperture Extreme Ultraviolet) lithography machines from ASML in the Netherlands from one unit to two recently, underscoring the company’s strong commitment to its 14A process node.
As semiconductor processes advance to more sophisticated nodes, conventional EUV lithography approaches its physical limits, making High-NA EUV a critical tool for breaking these bottlenecks. ASML’s High-NA EUV capacity is extremely limited, producing only five to six units annually, with a single machine priced at approximately USD 370–380 million. Only a handful of financially strong chipmakers—including TSMC, Samsung, SK Hynix, and Intel—can afford such equipment.
Intel’s aggressive investment expansion is partially supported by recent external funding. In 2025, Intel received a USD 5 billion capital injection from NVIDIA and a USD 2 billion investment from SoftBank. These funds significantly strengthened Intel’s cash flow and capital expenditure capacity, enabling it to secure initial High-NA EUV production slots from ASML.
With a strategic focus on the 14A process (1.4 nm node), Intel plans to leverage High-NA EUV technology to improve process precision and yield, thereby attracting more foundry clients. However, company executives have clearly stated that if the 14A process fails to gain market adoption, Intel may be forced to exit the high-end process node competition, which would severely impact its Intel Foundry Services (IFS) business.
Although Intel has added a second High-NA EUV unit, whether the equipment can fully overcome process bottlenecks remains uncertain. Factors such as yield management, design tool maturity, and full supply chain coordination will determine Intel’s ability to successfully turn the tables. Senior Intel engineer Steve Carson revealed that the first two High-NA EUV machines are capable of producing approximately 30,000 wafers per quarter, with each silicon wafer yielding several thousand chips, indicating a noticeable improvement in equipment stability.
PS
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EXE bonanza?
Shirley!
ASML
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