You point is well taken and I posed my comments incorrectly. We had stated they same thing but yours was more eloquent. Mix and match is the reason behind this as you state. My point was that the two systems are identical with the exception of the illumination portion of the tool. this means that the Engineers and the manufacturing personnel do not have to be retrained. The identical computers, buttons, programs, routines, etal are used on each system so training, cross training, specifications, PM cycles, reticle handling, wafer handling, test wafer processing, and other procedures are transparent to the operation. most of the Field service and maintenace is identical, again with the except of the DUV illumination portion. This allows more commonality on spares parts, etc. That was really my point, that the commonality was there for ease of use.
However, the real key is that the i-line systems can be retrofitted down the road without any interruption in the manufacturing cycle other than the conversion time.
I may not be saying it eloqently but I hope you understand what the gist of my comments were really aimed at. Mix abd match step and scan is definitely important but the commonality and transparent upgradeability are what are really exciting anmd worthy of mention.
Andrew |
