More on X-ray, IBM, Cymi Form Lehman Bro
Headline: Semiconductor Equipment/Electronics: Update From IBM Facility Tour
Author: Edward C. White, Jr., CFA 1(212)526-4744/Andrew Galligan
Company: AMAT, KLAC, LRCX, SVGI, TER
Country: ECO CUS
Industry: ELECTS,SEMICO
Today's Date : 02/27/98
* Earlier this week, we toured IBM's semiconductor research facilities in
Fishkill, NY, and attended presentations by managers. Some important
information for semiconductor equipment investors was revealed during the day.
* The chip manufacturing facilities include the Advanced Lithography Facility
(ALF), containing x-ray lithography equipment, and the Advanced Semiconductor
Technology Center (ASTC) where advanced DRAM and Logic research occurs.
* IBM is at the forefront of x-ray lithography which they expect to use for
production at the 0.13 - 0.15 micron generation when they expect the cost of
optical litho. techniques to be greater than x-ray techniques.
* X-ray steppers were supplied BY Silicon Valley Group, Karl Suss, and Canon.
The synchotron x-ray light source, which costs approximately $25 million, can
support 18-20 steppers.
* The ASTC contains more than 250 tools and is used for R&D on 4 generations
of DRAMs and 3 generations of Logic chips and 3-5 other various manufacturing
processes; below we list some of the equipment vendors represented there.
The equipment we saw at the ASTC included an SVGI Micrascan III for 0.2
microns and below, powered by a Cymer EX-5700 laser, KLA-Tencor 2135 Beta tool
for 0.18 micron work and a KLA 2130, Nikon EXX, Lam 9 wafer cluster tool, Lam
4500 oxide etcher, Teradyne J937 for 64 Mbit memory testing, multiple
Electroglas probers, Applied Materials Opal leading edge metrology tools, CFM
Technologies cleaning systems, Dai Nippon Screen track machines, Tokyo
Electron track machines, Silicon Valley Group vertical furnaces, and Hitachi
metrology tools.
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Disclosure Legend: A-Lehman Brothers Inc. managed or co-managed within the
past three years a public offering of securities for this company. B-An
employee of Lehman Brothers Inc. is a director of this company. C-Lehman
Brothers Inc. makes a market in the securities of this company. G-The Lehman
Brothers analyst who covers this company also has position in its securities. |
