Dupont Photomasks (DPMI) Message Board

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Technology Stocks : Dupont Photomasks (DPMI)

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To: jeffbas who wrote (260)	3/1/1998 2:51:00 AM
From: Duane L. Olson	Read Replies (1) of 955

Jeffrey...I'm not sure of TechInvestor's sources for comments that the DPMI/UT achievement was part of a "normal extension" of the technology... Folks on the SI have friends who toured the IBM Advanced Lithography Labs a couple of days before the UT report. Here is info that was passed on to me. It indicates that IBM was strongly inclined to believe that they would be going to direct write at .13 micron and below, given the difficulties with optical (DUV) methodologies... They passed this extract from a report by one of the guys who did the tour: Quote: * IBM is at the forefront of x-ray lithography which they expect to use for production at the 0.13 - 0.15 micron generation when they expect the cost of optical litho. techniques to be greater than x-ray techniques. * X-ray steppers were supplied BY Silicon Valley Group, Karl Suss, and Canon. The synchotron x-ray light source, which costs approximately $25 million, can support 18-20 steppers. Unquote Odd that one of the top companies in the industry was so unaware of something that was part of the "normal extensions" don't you think? I'll try to get that report for the Thread.. Always nice to deal in FACTS, before opinions, IMHO... TSO

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