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Technology Stocks : General Lithography
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To: Andrew Vance who wrote (802)3/1/1998 1:26:00 PM
From: James Word  Read Replies (1) of 1305
 
Andrew RE: Moto and Canon

Yes, I believe you are correct that Virginia fab with Siemens will be
all Canon. However, when this fab was originally conceived, it was
slated to be 100% DRAM. That has changed somewhat, but they have
stuck with the Canon systems anyway. My point on SVGL was that for
logic devices like microprocessors where linewidth uniformity within
a chip is by far the most important concern, the Micrascan seems to
be becoming ever more popular. You just can't beat a step-and-scan
system for that application. For DRAM, you can almost get away with
i-line lithography for 0.25um. Have you seen some of the latest
i-line resists these days?

I know that most of the big IC manufacturers and anxiously awaiting the day when ASML, Canon, and Nikon have produciton worthy scanners.

INTC is absolutely going 100% Micrascan for DUV. I have friends in
INTC DUV fabs who confirm this. Nikon is strictly i-line at Intel.
Still, not a bad place to be for Nikon.

James Word
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