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To: shane forbes who wrote (10322)3/2/1998 3:10:00 AM
From: Duane L. Olson  Read Replies (2) of 25814
 
Wiz, Here is the best article I've seen on that UT .08 micron Experiment... Many interesting and new (to me) facts. Were you aware, for example, that the steppers using the (far out) Argon Fluoride eximer lasers (available as early as next year -- perhaps) will be able to put chips out only at about a third the rate of the current "i-line" (365 nm, mrecury arc lamp) steppers such as those produced by ASML?.. Anyway, much of intrest: ((With a tip of the hat and a big thank you to Eddy over on the DPMI thread):http://news.semiconductoronline.com/feature-articles/19980227-124.html TSO
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