Robert, Orion = ArF = 193nm, to my understanding, I cite the C.C. notes.
This is from the MAN himself, Dr. Akins.
<<< the course of 1998 we are going to be going from truly a single-product company - one product for one particular application - to this family or suite of products I referred to earlier, with our 5000-series laser continuing for sale for a number of years in the future. Our new 5010 model, the new Orion product, the ArFl laser model that we introduced in late 1997. >>>
So going back to that article, kindly provided by eddy B:
news.semiconductoronline.com
Article: <<< Optics are the principal difficulty for 193 nm exposure tools. The ArF laser has inherently broadband emission, and relatively low power (10 -12 watts), Thompson said.>>>
Confrence Call (Akins): I didn't mention, in any specific way, what we are doing on the competitive front with the 5010 and the Orion model that we will be introducing over the course of the year. I'll keep my remarks here principally to the Orion, but the Orion is a 2 kilohertz 20 watt average-power machine, with substantial improvements in pulse-to-pulse stability, bandwidth, and other areas
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I do not know if a two fold increase in power out put is
sufficient for ArF to overcome the optical problems cited
in the article. Cymer does have an ArF tool that exceeds
the 10-12 watts specified as being an impediment.
I thought this contrast was significant to bring out and discuss.
You, like myself are informed laypersons in these matters. We need
a Maxwell, Specialist or *AV* to wiegh in.
Regards,
Denis |
