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To: Tulvio Durand who wrote (1439)3/5/1998 4:26:00 PM
From: Ian@SI  Read Replies (2) of 2946
 
Tulvio,

If I said what you quoted, it's either untrue or misleading - the adjectives are modifying the wrong subjects...

Ian, you said SVGI's stepper/scanners have two unique advantages, faster optics and larger scanned fields.

I don't know what "faster optics" means and certainly didn't mean to say this. I don't know whether or not the MicraScan will process a larger field than other steppers or other step and scanners.

Please explain how larger scan is attained.

Can't help here.

Also, is SVGI tool more expensive than, say, comparable ASM's

I don't know.

What I probably said was that the MicraScan has a unique set of optics comprised of both mirrors and lenses. Other use lenses alone.
This had allowed SVGI to do a better job of gathering light permitting their step/scanner to achieve smaller feature sizes than the competition.

I may have made some comment about Cymer's laser generating more DUV light permitting a faster exposure of the photoresist than would otherwise be possible with a Hg vapour lamp.

I may have also made comments about "scanning" permitting better uniformity of focus/exposure across larger fields than would be the case with steppers, all else equal.

If you can point me to a specific post of mine, I'll happily re-read it and make any necessary corrections / retractions.

Ian.
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